Protocols
Most protocols are only available to registered users of the microfab facility.
General:
Equipment:
- ParaTech LabTop 3000 Parylene Coater (see KC Aw in Engineering)
- Benchtop Sputter Coater
- ABM Mask Aligner
- TB200 Metal Evaporator
- March CS-1701 RIE (O2 Plasma)
- Laurell WS-400B-6NPP/LITE Spin Processor
- Laurell WS650Mz23NPP Spin Processor
- JEOS Metal Evaporator (see KC Aw in Engineering)
- Dektak XT Profilometer
- Metrology Microscope
Processing:
- Glass or Si Substrate Cleaning (includes piranha)
- Wet Etching of Metal Films
- Wet Metal Etchants
- nLOF 2000 Series Negative Photoresists
- AZ1518 Positive Photoresist
- AZ 40 XT Thick Film Positive Photoresist
- SU-8 2000 Series Negative Photoresists
General Laboratory
General Health and Safety:
Updated: Safety and Entry Training:
ALL users must train before entering the cleanroom. To start:
- Contact the lab manager to register your intent.
- Print off the Safety and Entry Checklist.
- Print off the SCS Card Access Request Form.
Section 1 of the checklist will ask you to read and understand a number of safety and protocol documents – these are listed on the checklist. This involves a significant amount of reading and so please prioritise your reading as follows:
These three items need to be read and understood BEFORE the training session in the cleanroom:
- Basic Safety Requirements for Laboratory Work Practices
- Cleanroom Entry Guide
- Cleanroom Waste Disposal Protocol
The rest need to be read and understood BEFORE the training is complete and signed off:
