Mask Aligner Maintenance

A note to all users of the mask aligner in the cleanroom:

• A filter has been added (Kopp 9345, 2mm thick) to improve i-line processing, especially for those using SU8.

• The mask holder is back on but with a ~80mm hole cut out of the center. This modification was done as the glass was scratched, leading to spurious patterns.

• The bulb was realigned – please do not align the bulb without first consulting with Bryon.

The total effect of the changes on your process should be positive – with fewer defects and improved sidewalls. However process times will have changed slightly – please check your exposure conditions for future work.